| 摘要 |
A photoacoustic detection device including a nanophotonic circuit including a first chip on which is formed at least one optical waveguide and in which is formed a set of cavities defining a Helmholtz resonator; at least one optical source capable of emitting an optical signal in a given wavelength range, capable of being modulated at an acoustic modulation frequency, this source being attached to the first chip; a second chip forming a cap for said cavities and including acoustic sensors; and electronic circuits for processing the output of the acoustic sensors formed in the first or the second chip. Further, an optical waveguide comprising, on a silicon substrate, a silicon germanium core with a variable germanium concentration along a direction perpendicular to the substrate, said core being covered with a cladding silicon layer. |
