MEMS MULTI-MODE BANDPASS FILTER

摘要

A multi-mode bandpass filter may comprise a a first and a a second multi-directional vibrating microelectromechanical systems resonator. The first multi-directional vibrating microelectromechanical systems resonator is in a parallel configuration. The second multi-directional vibrating microelectromechanical systems resonator is in a series configuration. Each multi-directional vibrating microelectromechanical systems resonator has a first transverse piezoelectric coefficient, a second transverse piezoelectric coefficient and a longitudinal piezoelectric coefficient for the piezoelectric material, each respectively associated with a resonant frequency. The multi-mode bandpass filter may be used as a tuneable duplexer.