| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance mechanism capable of highly maintaining conveying precision by suppressing a rise in temperature of an arm section itself. SOLUTION: This conveyance mechanism for carrying in/out an object W to be treated with respect to a treatment apparatus which carries out heat treatment to the object to be treated in a treatment container 56 is provided with: arm sections 36A and 36B equipped with a plurality of arms 94, 96 and 98, and configured to bend/stretch and turn; fork sections 38A and 38B connected to the top ends of the arm sections, and configured to hold the object to be treated; and a heat shielding plate 104 formed at a section intruding in the treatment container in the arm sections. Thus, it is possible to highly maintain conveying precision by suppressing a rise in temperature of the arm section itself. COPYRIGHT: (C)2011,JPO&INPIT |
