| 摘要 |
PROBLEM TO BE SOLVED: To provide a hardening device, in which even in a thick resin plate, the surface thereof can be hardened smoothly and which is excellent in mass productivity, and to provide a method for hardening a metal oxide film.SOLUTION: In an object W to be treated, there is formed a metal oxide film on the surface of a resin plate. A hardening device M for hardening the object to be treated includes: at least two vacuum treatment chambers 10a, 10b, 10c to be connected consecutively to one another; and conveying means 4, 5, 6 for conveying the resin plate among the vacuum treatment chambers. An oxygen ion irradiation means 8 for irradiating the object to be treated with an oxygen ion is arranged in the vacuum treatment chamber 10b positioned on the upstream side of a conveying direction. A plasma formation means 9 for forming plasma P of oxygen gas and an inert gas is arranged in the vacuum treatment chamber 10c positioned on the downstream side of the conveying direction. The object to be treated, which is irradiated with the oxygen ion from the side of the metal oxide film, is exposed to the plasma formed from the oxygen gas and the inert gas. |
