| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a graphene film with high in-plane uniformity and reproducibility and less damage.SOLUTION: The formation of a graphene film with high in-plane uniformity and reproducibility and less damage becomes possible by performing a reduction step of heating a metal film under a hydrogen gas atmosphere, a graphene film growth step of heating the metal film under a mixed gas atmosphere in which the composition ratio of a propylene gas to a hydrogen gas is 10 ppm or more and less than 1,000 ppm, and a cooling step of cooling the metal film. |
