| 摘要 |
PROBLEM TO BE SOLVED: To provide a solution to problems such as production efficiency deterioration involved in power supply breakage and cost increase involved in its repair, where the power supply breakage may be caused because a charging current output from a power supply in the voltage rising period of a rectangular wave and a capacitive discharge current output from the power supply in the voltage falling period of a rectangular wave are over the current resistance of the power supply.SOLUTION: A manufacturing method of an electrophotographic photoreceptor comprises a step in which a source gas is introduced into a reaction vessel and a deposition step in which a first rectangular wave voltage reaching a voltage equal to or more than discharge start voltage is given to an electrode opposed to a ground electrode from the power supply and a deposition film is deposed on a substrate placed within the reaction vessel by the plasma CVD method. Before the deposition step, a waveform setting step is comprised in which a second rectangular wave voltage less than the discharge start voltage is given to the electrode, an output current of the power supply in the rising period of the second rectangular wave is measured, and on the basis of the measured value, the time in the rising period of the first rectangular wave is set such that the output current of the power supply in the rising period of the first rectangular wave is always less than the current resistance of the power supply. |
