发明名称 CHROMATIC CONVERTER FOR ALTIMETRY
摘要 The present invention relates to a chromatic converter for altimetry, intended to produce a real and complete image of a preset observation zone of a sample surface that is representative of the local height of the sample, the converter especially comprising: (i) a device for illuminating the sample, comprising at least one polychromatic light source; and (ii) a mask allowing N incident beams to be generated simultaneously from the polychromatic light, each incident beam defining one object point. The illuminating device is arranged in order to cover at any moment all of the preset observation zone, whereas the mask is arranged in such a way that it blocks a portion of the polychromatic light in order to allow only the N incident beams to pass, the latter defining object points that are distributed over substantially the entire extent of the observation zone. An Offner autocollimator comprising at least one Mangin mirror is employed to introduce axial chromaticity into the incident beams.
申请公布号 WO2013174826(A1) 申请公布日期 2013.11.28
申请号 WO2013EP60434 申请日期 2013.05.21
申请人 SYSMELEC SA 发明人 BURRY, JEAN-MICHEL;BERGER, LEON
分类号 G01B11/25 主分类号 G01B11/25
代理机构 代理人
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