发明名称 COATING AND MATERIAL METHOD
摘要 The innovation is targeted at the coating and material production method, which is based on the application of picosecond, femtosecond and attosecond pulses a) in a vacuum, b) in a gas-pressurised mode, c) in liquid state or d) in the clean room standard; the repetition frequency of the pulses is between the span of 100 kHz and 10 Ghz, with fibre reinforcement or semiconductor laser, which operate on the wavelength of the UV-visible-IR light. The laser beams are directed to a separate space a-d) with optic fibres or as a collimated beam and only inside this space is focused to the volatizing / processing material by self-cleansing optics.
申请公布号 WO2013175052(A1) 申请公布日期 2013.11.28
申请号 WO2013FI00025 申请日期 2013.05.22
申请人 ARCTIC IP INVESTMENT AB 发明人 KINNUNEN, PETTERI;RUUTU, JARI
分类号 H01L21/02;B23K26/12;C23C14/28;G02B27/00 主分类号 H01L21/02
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