| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope in which a measuring head can be removed safely from a specimen stage and turned out.SOLUTION: A scanning probe microscope comprises a measuring head 14 which is mounted on a specimen stage 22. The measuring head 14 includes a cantilever 3 having a probe in a free end, an XYZ scan mechanism which scans the cantilever 3 in a three-dimensional manner with respect to a specimen 1, and a casing 12 which holds the XYZ scan mechanism. Furthermore, the scanning probe microscope comprises a handle 30 which is provided in the casing 12, a hinge 34 which is a rotary mechanism for supporting the measuring head 14 in a rotatable manner, a connection part 31 connecting the casing 12 and a rotary ends of the hinge 34, and a strut 32 holding a fixed end of the hinge 34. The measuring head 14 is connected to an installation base which is comprised of a mirror body 20 and a pedestal 26 for installing the specimen stage 22 thereon, via the connection part 31, the hinge 34 and the strut 32. |
