| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition method and a vapor deposition device, capable of forming a vapor deposition pattern on a large-sized substrate, and a method for manufacturing an organic EL display device, in which the vapor deposition method is used.SOLUTION: A vapor deposition device 50 in which a partition wall 26 stands between film formation regions on a film formation substrate 200 includes: a mask unit 80 including a shadow mask 81 and a vapor deposition source 85 fixed in position relative to each other; contacting means 71, 87, 88 for bringing the film formation substrate 200 into contact with the shadow mask 81 via the partition wall 26; and a moving means 70 for relatively moving at least one of the mask unit 80 and the film formation substrate 200 while the contact caused by the contacting means is kept. The partition wall 26 is formed in a stripe shape along a direction in which the moving means relatively moves the at least one of the mask unit and the film formation substrate, and a plurality of the partition walls are formed discontinuously. |
