| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical resolution improving device which acquires space frequencies unavailable from reproduced space frequencies of a normal imaging optical system so as to have an effectively high resolution.SOLUTION: The irradiation light from a laser light source 10 is focused on a sample S, through which a light flux passes to be converted to a parallel light flux with a lens 15. A first beam splitter 12A is arranged below the lens 15 for splitting the light beam. A first photodetector 6 including split photodetectors 6A and 6B is located below the first beam splitter. The light flux from the sample S is converted to a parallel light flux with a lens 16 on an optical axis L1 tilted to the right side, and reflected by a mirror 18. The split light flux split by the first beam splitter 12A is sent to the side of a second beam splitter 13 below the mirror 18. The light flux from the lens 15 and the light flux from the lens 16 interfere with each other so as to be received with a second photodetector 4 and with a second photodetector 5 as well. The photodetectors 6A and 6B and photodetector groups 4 and 5 are connected to a comparator 33. A data processing part 34 obtains the profile of the sample S. |
