| 摘要 |
PROBLEM TO BE SOLVED: To cause each probe of a probe unit to surely perform probing into a plurality of probing targets on a substrate.SOLUTION: The substrate inspection device comprises: a movement mechanism that causes probes (201a and 201c) of a probe unit to perform probing into the plurality of probing targets (bump 101a); and a process part that identifies a correction value for correcting a position deviation between a probing position of each probe and the probing target to correct the position deviation, and is configured to enable an inspection of a substrate. In an inspection causing a pair of probes to perform the probing into one probing target to thereby enable the inspection thereof, when a combination of a pair of probes and one probing target plurally exists, the process part performs an identification process identifying a separation distance (La1) between a midpoint (Pm1) of a line segment connecting each probing position of the pair of probes in one combination and a central part (Cs1) of the probing target therein as the correction value as to a plurality of combinations thereof. |
