ORGANIC EL FILM FORMATION APPARATUS AND TRANSFER ROBOT TEACHING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an organic EL film formation apparatus which prevents the operation accuracy of a substrate transfer robot from being affected even when a vacuum deposition chamber is deformed by changes of the atmospheric pressure.SOLUTION: This invention figures out the detection state of at least one of a substrate and a hand at predetermined positions in the atmosphere and a vacuum for obtaining teaching data in the vacuum of an operation shaft of a transfer robot which carries the substrate into or out from a vacuum process chamber for processing the substrate. Then, the invention detects a correction amount of teaching data in the atmosphere on the basis of the figured result of the detection state.