发明名称 APPARATUS FOR DEPOSITING THIN FILM
摘要 An apparatus for depositing a thin film basically consists of a base, two lateral boards and two sealing members to form a closed chamber therein. Each lateral board is provided with a substrate on an inner side thereof. Each substrate has a side in contact with a chemical solution in the chamber to deposit a thin film on the side of the substrate through a chemical reaction.
申请公布号 US2013312666(A1) 申请公布日期 2013.11.28
申请号 US201213549929 申请日期 2012.07.16
申请人 SHIH YU-CHIU;LIU HSIU-PO;GCSOL TECH CO., LTD. 发明人 SHIH YU-CHIU;LIU HSIU-PO
分类号 C23C16/458 主分类号 C23C16/458
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