| 摘要 |
A height measuring method for a three dimensional shape measuring device comprises the steps of: respectively irradiating, onto an object to be measured, first grid pattern light having a first equivalent wavelength and second grid pattern light having a second equivalent wavelength that differs from the first equivalent wavelength, from a plurality of first irradiation devices and a plurality of second irradiation devices disposed alternately with the first irradiation devices, and thereby acquiring a first pattern image corresponding to the first grid pattern light and a second pattern image corresponding to the second grid pattern light; generating combined pattern images by combining together first and second pattern images acquired by means of neighbouring first and second irradiation devices among the plurality of first and second irradiation devices; calculating heights of the object to be measured according to the combined equivalent wavelengths of the combined pattern images; and establishing a representative height of the object to be measured by using the calculated heights of the object to be measured. Consequently, it is possible to measure the height of an object to be measured that exceeds a measurable height, and it is possible to acquire a height of an object to be measured that can be more accurate and reliable. |
