发明名称 LOCAL COATING METHOD OF CONTACT FINGER FOR TESTING SEMICONDUCTOR USING THERMAL CONDUCTIVITY
摘要 A local coating method of a contact finger for testing a semiconductor is disclosed. The local coating method of a contact finger for testing a semiconductor by one embodiment of the invention comprises a first step of selectively heating the central part while transferring multiple contact fingers with a bent part on the central part in row; a second step of forming a coating part on the whole surface of the contact finger by dipping the contact finger in a coating solution container in which a coating solution is contained and performing dip-coating; and a third step of removing both ends of the coating part.
申请公布号 KR101334132(B1) 申请公布日期 2013.11.28
申请号 KR20120155777 申请日期 2012.12.28
申请人 KOREA ELECTRONICS TECHNOLOGY INSTITUTE 发明人 LEE, CHURL SEUNG;PARK, JI SUN;CHO, JIN WOO;KIM, SUNG HYUN;SHIN, KWON WOO;HA, IN HO
分类号 G01R1/067;G01R3/00;H01L21/66 主分类号 G01R1/067
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