发明名称 MEASURING APPARATUS AND MEASURING METHOD USING ELECTROMAGNETIC WAVE
摘要 PROBLEM TO BE SOLVED: To provide a measuring apparatus and method, which allows electromagnetic waves from a sample in contact with a window member to be detected in a state that the refractive index difference at the interface between the sample surface and the window member is adjusted for accurate acquisition of reflection waves at an interface inside the sample.SOLUTION: The measuring apparatus includes a window member 110 which comes in contact with a sample 111, irradiation means 101 which irradiates the sample in contact with the window member with electromagnetic waves, detection means 102 which detects the electromagnetic waves from the sample in contact with the window member, and dielectric constant adjustment means 108 which varies the dielectric constant of the window member.
申请公布号 JP2013238401(A) 申请公布日期 2013.11.28
申请号 JP20120109394 申请日期 2012.05.11
申请人 CANON INC 发明人 KOIZUMI TAKAYUKI;KUBOTA OICHI
分类号 G01N21/01;G01N21/27;G01N21/35;G01N22/00 主分类号 G01N21/01
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