发明名称 |
EXPOSURE DEVICE AND TABLE FOR EXPOSURE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device capable of making connection strength in assembling a stage higher, the stage being in a divided state in which processing and transportation are easy, and to provide an exposure device that can be easily assembled or in which the assembled part can be easily adjusted from the divided state even after the assembly, or a liquid crystal exposure method.SOLUTION: In an exposure device, a connection table connecting a plurality of tables constituting a stage and having a hollow four-prism structure is provided; a projection is provided on a connection surface and inserted into a mating table; and the position of the projection is operated from the upper surface of the table. An air quantity in an air storage chamber provided on the connection surface is adjusted. |
申请公布号 |
JP2013238886(A) |
申请公布日期 |
2013.11.28 |
申请号 |
JP20130162264 |
申请日期 |
2013.08.05 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
MAKI NOBUYUKI;WATABE SHIGEO;MATSUYAMA KATSUAKI |
分类号 |
G03F7/20;G02F1/13;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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