| 摘要 |
PURPOSE: A vacuum dryer is provided to improve reliability of non-drying product by drying a large amount of solvent using vacuum and heat. CONSTITUTION: A vacuum dryer comprises a main body, a housing(120), and a heater(170). The housing is installed inside the main body and comprises a chamber(120a). The chamber loads and dries a non-drying product like a substrate for a flat panel display device. The heater is installed inside the housing and heats the non-drying product. |
