发明名称 CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cleaning device having a simple structure, capable of holding an object to be cleaned having a different diameter by support rollers and cleaning a lower surface of the object to be cleaned.SOLUTION: A cleaning device 1 includes: rotation holding means 2 for holding an object to be cleaned at an outer peripheral edge to rotate it; and cleaning means 3 for cleaning a lower surface of the object to be cleaned held by the rotation holding means 2. The rotation holding means 2 includes: support rollers 21a-21d rotating around rotary shafts R1a-R1d, respectively, while contacting an outer peripheral edge Sc of the object to be cleaned; rotary drive sources 23a-23c attached to the support rollers 21a-21c, respectively; rotary bases 22a-22d rotatably supporting the support rollers 21a-21d, and rotating around rotary shafts R2a-R2d different in position from the rotary shafts R1a-R1d of the support rollers 21a-21d, respectively; and moving mechanisms 25a and 25b positioning the support rollers 21a-21d to a small diameter holding position and a large diameter holding position. The device 1 cleans a lower surface of the object to be cleaned according to a change in diameter of the object to be cleaned.
申请公布号 JP2013239498(A) 申请公布日期 2013.11.28
申请号 JP20120110068 申请日期 2012.05.11
申请人 DISCO ABRASIVE SYST LTD 发明人 YAMAHATA ICHIRO;KIMURA KEN;MURATA KENJI
分类号 H01L21/304 主分类号 H01L21/304
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