发明名称 OXIDE THIN FILM TRANSISTOR, METHOD FOR FABRICATING TFT, DISPLAY DEVICE HAVING TFT, AND METHOD FOR FABRICATING THE SAME
摘要 There are provided an oxide TFT, a method for fabricating a TFT, an array substrate for a display device having a TFT, and a method for fabricating the display device. The oxide thin film transistor includes: a gate electrode formed on a substrate; a gate insulating layer formed on the entire surface of the substrate including the gate electrode; an active layer pattern formed on the gate insulating layer above the gate electrode and completely overlapping the gate electrode; an etch stop layer pattern formed on the active layer pattern and the gate insulating layer; and a source electrode and a drain electrode formed on the gate insulating layer including the etch stop layer pattern and the active layer pattern and spaced apart from one another, and overlapping both sides of the etch stop layer pattern and the underlying active layer pattern.
申请公布号 US2013313530(A1) 申请公布日期 2013.11.28
申请号 US201213729539 申请日期 2012.12.28
申请人 LG DISPLAY CO., LTD. 发明人 SEO HYUNSIK;KIM MOONGOO;KIM BONGCHUL;LEE JEONGHOON;RYOO CHANGIL
分类号 H01L29/786;H01L29/66 主分类号 H01L29/786
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