Method for polishing substrate with foamed polishing cloth, involves providing polishing cloth with blind holes whose positions correspond with outlet openings such that polishing agent passes through polishing cloth

摘要

The method involves providing a foamed polishing cloth (1) that occupies outlet openings (3a) of a polishing plate (4). A polishing agent is applied on a side through the outlet openings. The cloth is formed with a porous structure having multiple pores (2), which are partially connected with one another by micro holes (6) that are pierced at a front side. The cloth is provided with blind holes (7) that are not pierced at a cloth front side and reach at a rear side in the cloth, where positions of the blind holes correspond with the outlet openings such that the agent passes through the cloth.