| 摘要 |
The present invention relates to a device for manufacturing metal or metallic compound nanoparticles attached to a carrier, wherein the device comprises: a vacuum evaporation vessel; a stirring vessel equipped inside the vacuum evaporation vessel; a screw which is equipped inside the stirring vessel and agitates the carrier; and an evaporation source which is included at the upper part of the stirring vessel and evaporates the metal or metallic compound. The upper end of the side surface of the stirring vessel is bent at 1-90 degree toward the center based on a perpendicular plane. The screw is included in the vertical or horizontal direction in order to agitate 1/5-3/4 of the entire depth of the carrier loaded in the stirring vessel. The device for manufacturing nanoparticles of the present invention prevents the occurrence of excessive flying in a vacuum vessel, moves the carrier with a constant speed by minimizing mechanical load, manufactures nanoparticles with a constant size and increases deposit efficiency by uniformly stirring the carrier and enhances the durability of the device by minimizing mechanical load and device load. [Reference numerals] (AA) Valve for controlling pressure;(BB) Vacuum tank;(CC) Atom steam generating unit;(DD) Carrier mixing tank;(EE) High vacuum pump;(FF) Low vacuum pump |
