THIN FILM FORMING POSITION, AND REPAIRING METHOD AND ADJUSTING METHOD FOR THIN FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thin film forming device which can swiftly perform recovery processing when a failure occurs in a nozzle hole.SOLUTION: A base is held by a holding face of a stage. A nozzle head is opposed to the base held by the stage. The nozzle head has a plurality of nozzle holes for discharging droplets of thin film materials toward the base. A moving mechanism moves the stage to a direction in parallel with the holding face with respect to the nozzle head. An imaging device is configured to be able to move to the nozzle head, and to move to a position at which the nozzle holes can be imaged.