发明名称 ALKALI ETCHANT AND ALKALI ETCHING METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an alkali etchant and an etching method which allow the improvement of a shortcoming that a conventional alkali etchant has.SOLUTION: The alkali etchant is for use in wet etching, and comprises: sodium hydroxide aqueous solution; and sodium hypochlorite dissolved in the sodium hydroxide aqueous solution so as to have a density (vol.%) within a range of a density (vol.%) determined by the following formula ±10%: 0.0087×Density of the sodium hydroxide aqueous solution (mass%)-0.039.
申请公布号 JP2013239661(A) 申请公布日期 2013.11.28
申请号 JP20120113000 申请日期 2012.05.17
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 ONISHI KUNIAKI
分类号 H01L21/306;H01L21/304 主分类号 H01L21/306
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