发明名称
摘要 <p>The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter. Embodiments of priming routines described herein can perform a back pressure step to pressurize the filter from downstream and a back flush step to flush the filter from downstream.</p>
申请公布号 JP2013543270(A) 申请公布日期 2013.11.28
申请号 JP20130535081 申请日期 2011.10.20
申请人 发明人
分类号 H01L21/027;G03F7/26 主分类号 H01L21/027
代理机构 代理人
主权项
地址