摘要 |
PROBLEM TO BE SOLVED: To provide a solid electrolyte membrane in which deviation from the composition of a target is reduced, and to provide a manufacturing method therefor, and a solid cell including such a solid electrolyte membrane.SOLUTION: The manufacturing method of a solid electrolyte membrane deposits a solid electrolyte membrane on the surface of a substrate by a pulse laser deposition method, by irradiating a target with laser in a chamber where the oxygen partial pressure is controlled to 10 Pa or above. The solid electrolyte membrane is deposited by a pulse laser deposition method for irradiating a target with laser in a chamber where the oxygen partial pressure is controlled to 10 Pa or above. The solid cell has a positive electrode layer and a negative electrode layer, and a solid electrolyte layer interposed therebetween. The solid electrolyte membrane deposited by the method is used as the solid electrolyte layer. |