发明名称 |
MICROFLUIDIC PRESSURE AMPLIFIER CIRCUITS AND ELECTROSTATIC GATES FOR PNEUMATIC MICROSYSTEMS |
摘要 |
An electrostatic actuator is provide that can include a fluidic line, a first electrode, and a second electrode such that a gate chamber portion of the fluidic line is sandwiched between the first electrode and the second electrode. The electrostatic actuator can also include a pressure-balancing channel in fluid communication with the gate chamber portion where the first electrode is sandwiched between the pressure-balancing channel and the gate chamber portion. A pneumatic valve system is provided which includes an electrostatic gate and a fluidic channel fluidly separate from a fluidic control line. A pneumatic valve portion of the fluidic control line can be positioned relative to a portion of the fluidic channel such that expansion of the pneumatic valve portion restricts fluid flow through the fluidic channel. Methods of using an electrostatic actuator and a pneumatic valve system are also provided.
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申请公布号 |
US2013313452(A1) |
申请公布日期 |
2013.11.28 |
申请号 |
US201313901200 |
申请日期 |
2013.05.23 |
申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
TICE JOSHUA D.;BASSETT THOMAS A.;DESAI AMIT V.;APBLETT CHRISTOPHER A.;KENIS PAUL A. |
分类号 |
F16K31/02 |
主分类号 |
F16K31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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