| 摘要 |
A small-sized, low-profile fluid pump (101) having high pumping capabilities is formed. The fluid pump (101) includes an actuator (40) and a planar section (51) made of a metal plate. The actuator (40) is formed by attaching a disk-like piezoelectric element (42) to a disk-like diaphragm (41). By the application of a square-wave or sine-wave drive voltage, the actuator (40) performs a bending vibration from the central portion to the peripheral portion. The peripheral portion of the actuator (40) is not restrained. The actuator (40) performs a bending vibration in the state in which it is in proximity to the planar section (51) while facing the planar section (51). A center vent (52) is provided at or near the center of an actuator facing area of the planar section (51) that faces the actuator (40). |
