| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for treating the surface of a long-sized body, which scarcely cause creases and the like even when thermal load exerted on the long-sized body such as a long resin film is increased by setting transport velocity high, etc.; and a method for manufacturing a resin film substrate laminated with copper-clad.SOLUTION: A treatment device is for surface treatment such as a sputtering web coater, and includes a cooling can roll 56, means for surface treatment accompanied by thermal load, such as sputtering cathodes 57, 58, 59, and 60, and a front feed roll 55. In the device, a transported long-sized body 52 is wound around the outer circumferential surface of the cooling can roll via the feed roll and the surface treatment is performed by the means for surface treatment. The front feed roll is composed of a heating roll, the feed roll is equipped with a nip roll 65 having a width expansion mechanism for applying tension to the long-sized body in the width direction, and the cooling can roll is formed in a crown-like shape that is high at the center thereof. |
