INFRARED RADIATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an infrared radiation element capable of enhancing the reliability and increasing the output power while reducing the power consumption.SOLUTION: An infrared radiation element 1 includes; a substrate 2; a functional layer 5 including a heat generation layer 3 and a protection layer 4 covering the heat generation layer 3 which are formed at one surface side of the substrate 2; an insulation layer 6 located at the one surface side of the substrate 2 and being interposed between the substrate 2 and the functional layer 5 to support the functional layer 5; and a pair of pads 9, 9 electrically connected to the heat generation layer 3 at the one surface side of the substrate 2. The substrate 2 includes an opening 2a formed to expose a surface at the side opposite to the heat generation layer 3 in the insulation layer 6. The insulation layer 6 includes a diaphragm portion 6D separating the opening 2a from the heat generation layer 3 and a support portion 6S formed in the periphery portion of the opening 2a at the one surface side of the substrate 2 to support the diaphragm portion 6D. The insulation layer 6 and the protection layer 4 are formed of a material having a linear expansion coefficient closer to that of the heat generation layer 3 than that of the pads 9, 9.