| 摘要 |
PURPOSE: A substrate processing device prevents damage to a main body due to thermal expansion by movably combining the main body forming a chamber with a frame. CONSTITUTION: A main body (110) is formed in a rectangular shape. A chamber as a space for processing a substrate (50) is formed inside the main body. A frame (120) is formed in the shape corresponding to the main body. A lower combination piece and an upper combination piece are formed on the frame and the lower surface of the main body, respectively. The lower combination piece and the upper combination piece are fixed by a coupling member. |
