DEVICE AND METHOD FOR VAPORIZING LIQUID

摘要

PROBLEM TO BE SOLVED: To provide a device for vaporizing and supplying a liquid while restraining the temperature of the vaporized portion from lowering by the heat of vaporization.SOLUTION: The device for vaporizing a liquid is a microwave heating device which has a microwave oscillator 10 and a resonator structure having a microwave irradiation space 20 and which is configured such that a reaction tube 30 produced from a microwave transmissive material is arranged in the microwave irradiation space 20, a microwave-absorptive solid substance 40 is fixed in the reaction tube 30 at a position where the microwave energy is concentrated, the liquid is supplied to the reaction tube 30 such that the supplied liquid is brought into contact with the microwave-heated microwave-absorptive solid substance 40 to vaporize the liquid.