| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide sputtering target for forming a protective film for an optical recording medium, capable of forming a film that has excellent storage stability, is flexible and hardly breakable, and also the oxide sputtering target capable of being subjected to direct-current sputtering and containing few particles, and to provide a protective film for an optical recording medium, which is produced by using the same.SOLUTION: An oxide sputtering target is an oxidation product with a component composition including 0.1 atom% or more In, 12 atom% or more Cr, and the balance Zn with inevitable impurities, based on the total amount of all the metal components, wherein the total of In and Cr is 53 atom% or less. |
