| 摘要 |
PROBLEM TO BE SOLVED: To make gaps between a diaphragm and electrodes be uniform and promptly form the gap regions between the diaphragm and the electrodes when a vibrator including the diaphragm and the electrodes arranged around the diaphragm on a substrate by a MEMS method.SOLUTION: An oscillator manufacturing method comprises: etching a second polysilicon film 42 after forming the second polysilicon film 42 on a first sacrifice film 61 to form a diaphragm 10; and subsequently stacking a third sacrifice film 63 and a third polysilicon film 43 from the bottom in this order so as to cover the diaphragm 10. At this time, by depositing the third sacrifice film 63 by using an ALD method, a film thickness t of the third sacrifice film 63 becomes extremely uniform and the film promptly dissolves in an aqueous solution of hydrofluoric. |
