| 摘要 |
The present invention prevents deterioration of the durability of a vacuum pump by suppressing wearing of a rotor and a side plate. This vacuum pump is equipped with a hollow cylinder chamber (S) that has an opening at one end of a casing body (22), a rotor (27) that is driven to rotate inside the cylinder chamber (S), a side plate (26) that closes the opening of the cylinder chamber (S), and a pump cover (24) that is provided on the opposite side of the rotor (27) across the side plate (26) and fixed to the casing body (22). The side plate (26) is provided with a connection hole (261) that faces a shaft hole (27A) of the rotor (27) and connects to a space (80) that is formed between the side plate (26) and the pump cover (24). |
