| 摘要 |
The present invention provides a manipulator capable of efficiently and uniformly cooling the manipulator when a workpiece such as a glass substrate processed in hot environment is carried, and havinglightweight structure in comparison with a conventional one, and a workpiece carrying robot using the manipulator. The manipulator of a robot of the present invention comprises a loadbearing part 11which is formed in a shape having a hollow 11a insulated from the outside and for placing the workpiece thereon, medium introducing pipes 15 for introducing a cooling medium into the hollow 11a on oneend side of the loadbearing part 11, and a medium discharge opening 17 for discharging the cooling medium from the hollow 11a on the other end side of the loadbearing part 11. |
