| 摘要 |
Objective
The present invention intends to provide a piezoelectric/electrostrictive actuator presenting excellent insulation durability even under high humidity atmosphere while suppressing inhibition of piezoelectric displacement.
Means for Solution
A piezoelectric/electrostrictive actuator (100), which comprises:
a piezoelectric/electrostrictive element (90) that comprises at least one laminate including one piezoelectric/electrostrictive layer (40,60) and one pair of electrodes (30,50,70) disposed respectively on both sides of said piezoelectric/electrostrictive layer (40,60) and has a moving part corresponding to a portion where said piezoelectric/electrostrictive layer is sandwiched by one pair of said electrodes and a non-moving part corresponding to a portion where said piezoelectric/electrostrictive layer is not sandwiched by one pair of said electrodes, and
a moistureproof membrane (80) disposed to cover at least the proximity of the boundary between said moving part and said non-moving part and consisting of silicone-based organic insulation material with storage elastic modulus of 100 kPa or less obtained by dynamic viscoelastic measurement using a parallel cone with diameter of 25 mm under a condition with strain of 0.1 %, frequency of 1 Hz, gap of 0.5 mm and temperature of 22 °C. |
