| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating device capable of shortening a processing tact and suppressing flow passage resistance low. <P>SOLUTION: Since an air vent tank removing a gas included in a liquid body to be supplied to a pump is provided in vicinity to the pump supplying the liquid body to a nozzle, the liquid body can be supplied quickly from the air vent tank to the pump and the processing tact can be shortened. Further, the air vent tank is put closer to the pump and then the flow passage length of the liquid body from the air vent tank to the pump can be shortened, so the flow passage resistance can be suppressed low. In addition, generation of micro bubbles in the flow passage can be suppressed by shortening the flow passage length of the liquid body from the air vent tank to the pump. <P>COPYRIGHT: (C)2009,JPO&INPIT |
