| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS (Micro Electro Mechanical System) vibrator which is easy to process, can reduce power consumption, and more easily adjusts its resonance frequency than the conventional one. SOLUTION: The MEMS vibrator is provided with: an oscillating body 721 which is fixed on a board 111 or at a plurality of points and has one or more groups of comb-like projections on the surface; one or more electrostatic electrodes 161, 162, 163 and 164 which form a comb-like capacitor between themselves and the group of comb-like projections of the oscillating body 721 and have the group of comb-like projections formed on the surface; a drive electrode 141; and a detection electrode 151. The oscillating body 721 comprises a vibration part 722 for oscillating by the drive voltage from the drive electrode 141 and one or more vibration restriction parts 723 joined to the vibration part 722. A DC voltage is applied to a comb-like capacitor to change a frequency of vibration of the vibration part 722. COPYRIGHT: (C)2010,JPO&INPIT |
