发明名称 Method of removing negative acting photoresists
摘要 <p>Polymerized negative acting photoresists are removed from substrates at relatively low temperatures and fast stripping times using aqueous based alkaline solutions.</p>
申请公布号 EP2667254(A1) 申请公布日期 2013.11.27
申请号 EP20130168681 申请日期 2013.05.22
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 CICCOLO, PAUL J.;AMOS, BRIAN D.;MCCAMMON, STEPHEN
分类号 G03F7/42 主分类号 G03F7/42
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