| 摘要 |
As to a coating apparatus of a chamber type, provided is good seal performance in a slide contact part of a board copper and a sealed member. A chamber (18) of a coating apparatus (1) comprises a chamber main body (30), a side seal (32), an upper blade (34), and a lower blade (36), and a ceramic solution (28) is demarcated in a lateral part of a plate side. In a board copper (14), a smoothing surface is formed in both outsides of a plate side, and a front end surface of the side seal is in slide-contact with the board copper in a rotation of the board copper. The upper blade spreads toward a rotation axis direction as to a rotational direction front end of the board copper in the chamber main body. The lower blade spreads toward a rotation axis direction as to a rotational direction rear end of the board copper in the chamber main body. A cleaning blade (56) for scratching out an extra ceramic solution attached to the smoothing surface of the board copper is installed. |
