| 摘要 |
A first substrate, which is held by adsorption to the bottom surface of a first holding member, and a second substrate, which is held by adsorption to the top surface of a second holding member, are joined. The first holding member or the second holding member is subsequently moved relative to the other in a vertical direction so as to dispose the first holding or the second holding member in predetermined positions. Then, the first substrate is evacuated via a suction tube using a suction mechanism disposed on the first holding member, and the quality of the joint between the first substrate and the second substrate is assessed on the basis of the internal pressure of the suction tube. In the assessment, when the internal pressure of the suction tube is greater than a predetermined threshold value, the joint between the first substrate and the second substrate is assessed as being normal, and when the internal pressure of the suction tube is less than or equal to the predetermined threshold value, the joint between the first substrate and the second substrate is assessed as being abnormal. |
