发明名称 STRUCTURE AND METHOD FOR FABRICATING FIN DEVICES
摘要 A structure and method of forming a semiconductor device with a fin is provided. In an embodiment a hard mask is utilized to pattern a gate electrode layer and is then removed. After the hard mask has been removed, the gate electrode layer may be separated into individual gate electrodes.
申请公布号 KR101333897(B1) 申请公布日期 2013.11.27
申请号 KR20120024137 申请日期 2012.03.08
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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