BIO SENSOR AND MANUFACTURING METHOD THEREOF

摘要

Disclosed are a manufacturing method for a bio sensor, and a bio sensor which comprises a first comb pattern carbon electrode which is equipped in the upper part of a substrate with an insulation layer; a second comb pattern carbon electrode which is placed with being separated from the first comb pattern carbon electrode; and a micro channel unit whose one end is combined with the top surface of the first comb pattern carbon electrode and the other end is combined with the top surface of the second comb pattern carbon electrode in order to form a channel between the first comb pattern carbon electrode and the second comb pattern carbon electrode. The structure of a bio sensor can be improved through the composition above in order to reduce the size of the bio sensor and to improve the sensitivity of the sensor. In addition, the oxidization/reduction of bio materials can be continuously repeated by preventing oxidized/reduced bio materials from being released to the outside of the bio sensor. [Reference numerals] (AA) Step of forming an insulation layer on an electrode;(BB) Spray a second photo resist;(CC) Expose;(EE) Form a micro channel layer;(FF) Spray a third photo resist;(GG) Firstly expose;(HH) Secondly expose;(S110) Step of forming an insulation layer on a substrate;(S120) Coat a photo resist;(S130) Expose a first and second electrode regions;(S140,DD) Develop;(S150) Form a first and second carbon electrodes using a pyrolysis method