发明名称 MANUFACTURING METHOD FOR TRANSISTOR, TRANSISTOR, ARRAY SUBSTRATE AND DISPLAY DEVICE
摘要 <p>Embodiments of the present invention provide a method for manufacturing a transistor, a transistor, an array substrate and a display device. The method comprises: forming a first source/drain metal layer on a substrate; forming an insulating layer above the first source/drain metal layer; forming a gate metal layer on the insulating layer; forming a gate insulating layer on the gate metal layer; forming a semiconductor layer above the gate insulating layer; forming an etching blocking layer on the semiconductor layer; forming a second source/drain metal layer above the etching blocking layer; forming an insulating layer above the second source/drain metal layer.</p>
申请公布号 EP2667404(A1) 申请公布日期 2013.11.27
申请号 EP20120830912 申请日期 2012.11.28
申请人 BOE TECHNOLOGY GROUP CO. LTD. 发明人 JIANG, CHUNSHENG
分类号 H01L21/28;H01L21/336;H01L29/41;H01L29/786 主分类号 H01L21/28
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