| 摘要 |
When compound semiconductor layers are formed on a compound semiconductor substrate (40) by sequentially layering group III nitride semiconductor crystalline layers by metal organic chemical vapor deposition method, the compound semiconductor substrate (40) is attached inside of a reaction container with the crystal growth surface thereof facing upward, a protection member (60) having plural grooves (63) formed in a radiating manner on the side facing the crystal growth surface is attached above the compound semiconductor substrate (40), and a material gas is supplied to the inside of the reaction container through a first through hole (61) provided in the center of the protection member (60). Thereby, in the manufacture of a compound semiconductor using metal organic chemical vapor deposition method, a decrease in yield caused by adhesion of peeled-off reaction byproducts to the substrate or to the epitaxially grown film on the substrate is suppressed.
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