Method and apparatus for measuring gas concentrations

摘要

Some embodiments are directed to a photoacoustic sensor. The photoacoustic sensor may comprise: a gas cell with an opening; a light source to generate to radiate a sample gas within the gas cell; an optical microphone to detect the sample gas within the gas cell; and a membrane aligned with the opening of the gas cell to permit sample gas to enter the gas cell. The optical microphone includes a semiconducting laser. The semiconducting laser includes a p-n junction within a cavity of the semiconducting laser. The optical microphone further includes a pressure-sensitive membrane that receives coherent light emitted from the semiconducting laser and directs reflected light back toward the semiconducting laser. During operation of the optical microphone, the pressure-sensitive membrane flexes in response to acoustic pressure waves. The phase of the reflected light is dependent upon a distance of the pressure-sensitive membrane from an aperture of the semiconducting laser.