发明名称 SLURRY MANAGEMENT DEVICE FOR WIRE SAW
摘要 A wire saw slurry management device is provided with: a first tank (5A) which receives slurry waste (3); a centrifugal separator (14) into which the slurry waste (3b) from the first tank (5A) is introduced and which isolates the slurry (2); a second tank (5B) which receives the solid-content slurry (2) from the centrifugal separator (14); a slurry supply path (26) which supplies the slurry (2) from the second tank (5B) to a fixed-abrasive wire saw (1); a controller (41) which detects the slurry density using a detection value from a density meter (29) and a viscometer (30), both provided on a circulation flow path (28) for extracting and circulating the slurry (2) from the second tank (5B); a slurry discharge path (33) which discharges some of the slurry (2) from the second tank (5B) as waste slurry (31); and a new slurry supply path (38) which supplies new slurry (2a) to the second tank (5B). The discharge of waste slurry (31) by the slurry discharge path (33) and the supply of new slurry (2a) by the new slurry supply path (38) are implemented in order to maintain a specific density for the slurry density detected using the controller (41).
申请公布号 KR20130128415(A) 申请公布日期 2013.11.26
申请号 KR20137015183 申请日期 2011.12.14
申请人 IHI COMPRESSOR AND MACHINERY CO., LTD. 发明人 TAKASU MIKIO;TANAKA MASAYA;UEDA HIROAKI;MATSUSHITA TSUTOMU;KAWABUCHI SHINJI
分类号 B24B27/06;B24B55/03;B28D5/04;B28D7/02;H01L21/304 主分类号 B24B27/06
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