发明名称 |
Method and apparatus for DUV transmission mapping |
摘要 |
Apparatus and method for transmittance mapping of an object which is at least partially transparent to deep ultraviolet radiation. The method comprises directing a wide-band deep ultraviolet radiation so as to illuminate different areas of an array of successive areas of the object; using an optical detector positioned on an opposite side of the object with respect to the radiation source detecting the wide-band deep ultraviolet radiation that emerges from the object; and processing signals from the optical detector to determine the transmittance of the radiation through the different areas of the array of successive areas of the object.
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申请公布号 |
US8592770(B2) |
申请公布日期 |
2013.11.26 |
申请号 |
US20080281059 |
申请日期 |
2008.07.10 |
申请人 |
BEN-ZVI GUY;ZAIT EITAN;DMITRIEV VLADIMIR J.;LABOVITZ STEVEN M.;GRAITZER EREZ;SHARONI OFIR;CARL ZEISS SMS LTD. |
发明人 |
BEN-ZVI GUY;ZAIT EITAN;DMITRIEV VLADIMIR J.;LABOVITZ STEVEN M.;GRAITZER EREZ;SHARONI OFIR |
分类号 |
G01F23/00 |
主分类号 |
G01F23/00 |
代理机构 |
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